Imec has presented the smallest silicon finFET that functions as a biosensor. Achieving ultrasmall dimensions (13 nm fin width and 50 nm gate length) and fabricated with a CMOS-compatible process flow in imec’s 300 mm cleanroom, imec envisions volume manufacturing and integration into high-throughput, cost-effective detection tools, with tens of thousands of these BioFETs working in parallel. With a demonstrated detection limit of tens of molecules today, imec ultimately targets highly accurate BioFETs sensing single DNA molecules.
